MNC 2019, Oct. 28-31, 2019
32nd International Microprocesses and Nanotechnology Conference
International Conference Center Hiroshima, Hiroshima, Japan



Organizing Committee Chair: Y. Ono (Shizuoka Univ.)
Organizing Committee Vice Chair: T. Kozawa (Osaka Univ.)

Steering Committee Chair: T. Tsuchiya (Kyoto UNiv.)
Steering Committee Vice Chair: M. Nagase (Tokushima Univ.)

Program Committee Chair: K. Nishiguchi (NTT)
Program Committee Vice Chair: K. Asakawa (KIOXIA)
Program Committee Vice Chair: K. Furukawa (Meisei Univ.)
Program Committee Vice Chair: D. Kondo (Fujitsu Labs)

Including TBC
Organizing Committee
Chair Y. Ono (Shizuoka Univ.)
Vice Chair T. Kozawa (Osaka Univ.)
Members
J. Ahn (Hanyang Univ.) T. Horiuchi (Tokyo Denki Univ.) H. Kotera (RIKEN) T. Sato (KIOXIA)
S. Akita (Osaka Pref. Univ.) T. Ichiki (Univ. of Tokyo) S. Matsui (Univ. of Hyogo) M. Suzuki (Kyoto Univ.)
H. Arimoto (AIST)   K. Ishibashi (RIKEN) T. Meguro (Tokyo Univ. of Sci.) T. Tsuchiya (Kyoto Univ.)
K. Asakawa (KIOXIA) T. Itani (Osaka Univ.) Y. Miyamoto (Tokyo Inst. of Technol.) H. Yaegashi (Tokyo Electron)
T. Asano (Kyushu Univ.) S. Kasai (Hokkaido Univ.) M. Nagase (Tokushima Univ.) H. Yamashita (Nuflare Technol.)
H. Azuma (Canon) E.-K. Kim (Hanyang Univ.) K. Nishiguchi (NTT) A. Yamaguchi (Hitachi)
T. Chikyow (NIMS) Y.M. Kim (Dankook Univ.) Y. Ochiai (JST) H. Yamaguchi (NTT)
K. Furukawa (Meisei Univ.) A. Kohno (Fukuoka Univ.) S. Okazaki (ALITECS)
Y. Hirai (Osaka Pref. Univ.) D. Kondo (Fujitsu Labs) S. Sato (Fujitsu Labs.)
Advisory Members
K. Aoyagi (Ritsumeikan Univ.) D. Kern (Univ. of Tubingen) R.F.W. Pease (Stanford Univ.) T. Tagawa (Osaka Univ.)
K. Gamo (Emeritus,Osaka Univ.) M. Komuro (KEK) K. Ronse (IMEC) M. Takai (Emeritus,Osaka Univ.)
E. Gogolides (Inst. Nanosci. Nanotechnol.) R. Luttge (Eindhoven Univ. of Technol.) M. Roukes (Caltech) S. Tan (INTEL Intel)
K. Hane (Tohoku Univ.) J. Melngailis (Univ. of Meryland) R. Shimizu (Osaka Univ.) S. Tedesco (Leti)
L.R. Harriott (Univ. of Virginia) S.-K. Min (Kyung Hee Univ.) S. Shoji (Waseda Univ.) A. Tserepi (IMEL)
Y. Horiike (Univ. of Tsukuba) L. Muray (KLA Tencor) H.I. Smith (MIT) S. Wurm (SEMATECH)
S. Ishihara (Univ. of Tokyo) A.R. Neureuther (UC Berkeley) A. Stein (Ctr. for Functional Nanomaterials)
S.S. Keller (DTU Nanotech) S.W. Pang (City Univ. of Hong Kong) T. Sugano (Emeritus, Univ. of Tokyo)
Steering Committee Members
Chair T. Tsuchiya (Kyoto Univ.)
Vice Chair M. Nagase (Tokushima Univ.)
Program K. Nishiguchi (NTT) K. Asakawa (KIOXIA) K. Furukawa (Meisei Univ.)
D. Kondo (Fujitsu Labs)
Exhibition H. Takemura (GenISys)
Treasure H. Yamashita (NuFlareTechnol.)
Contribution H. Yamazaki (Tokyo Ohka)
Public S. Nagahara (Tokyo Electron)
Local Y. Hasegawa (Hiroshima City Univ.)
Overseas A. Chen (ASML) S.W. Hwang (Samsung Advanced Inst. of Technol.)  C.-Y. Lo (Natl. Tsing Hua Univ.)
H.Y. Low (Singapore Univ. of Technol. and Design) J.-K. Shin (Kyungpook Univ.)
Program Committee Members
Program Chair K. Nishiguchi (NTT)
Program Vice-Chair K. Asakawa (KIOXIA) D. Kondo (Fujitsu Labs.)
K. Furukawa (Meisei Univ.)
1-1: Photolithography and Patterning Section Head T. Uchiyama (KIOXIA)
Sub Head A. Yamaguchi (Hitachi) T. Harada (Univ. of Hyogo)
Members J. Ahn (Hanyang Univ.) J. Miyazaki (ASML)
Y. Morikawa (DNP) H.-K. Oh (Hanyang Univ.)
K. Oyama (Tokyo Electron) G. Vandenberghe (IMEC)
1-2: Electron and Ion Beam Technologies Section Head H. Yamashita (NuflareTechnol.)
Sub Head M. Sakakibara (Hitachi) J. Yamamoto (Hitachi)
Sub Head K.-Y. Tsai (Natl. Taiwan Univ.) H.S. Kim (Sun Moon Univ.)
Members H. Abe (KIOXIA) S. Babin (A-Beam)
A. Kinomura (Kyoto Univ.) M. Kotera (Osaka Inst. of Technol.)
J. Yanagisawa (Univ. of Shiga Pref.)
1-3: Resist and Directed Self-Assembly Section Head T. Nagai (JSR)
Sub Head S. Nagahara (Tokyo Electron) S.O. Kim (KAIST)
Members S. Enomoto (Toyo Gosei) S.-J. Jeong (SAIT)
    D.H. Kim (Ewha Univ.) H.W. Kim (Samsung)
K. Morita (Oji Holdings) J. Santillan (Osaka Univ.)
    K. Okamoto (Osaka Univ.) H. Oizumi (Gigaphoton)
H. Yamamoto (QST)
2-1: Nanocarbons Section Head K. Yanagi (Tokyo Metropolitan Univ.)
Vice-Chair / Sub Head D. Kondo (Fujitsu Labs.) S. Okada (Univ. of Tsukuba)
Sub Head S. Chiashi (Univ. of Tokyo) J.-H. Ahn (Yonsei Univ.)
Members A. Ando (AIST) H. Omachi (Nagoya Univ.)
G. Kalita (Nagoya Inst. of Technol.) M. Katagiri (Panasonic)
S. Konabe (Hosei Univ.) T. Kondo (Univ. of Tsukuba)
K. Maehashi (Tokyo Univ. of Agriculture and Technol. ) K. Matsuda (Kyoto Univ.)
Y. Miyata (Tokyo Metropolitan Univ.) R. Negishi (Osaka Univ.)
T. Takenobu (Nagoya Univ.) M. Tanemura (Nagoya Inst. of Technol.)
K. Ueno (Saitama Univ.)
2-2: Nanodevices Section Head F. Ishikawa (Ehime Univ.)
Sub Head T. Yanagida (Kyushu Univ.)
S. Asahi (Kobe Univ.) A. Danner (Natl. University of Singapore)
K. Eriguchi (Kyoto Univ.) S. Hara (Hokkaido Univ.)
A.M. Hashim (Univ. Teknologi Malaysia) A. Higo (Univ. of Tokyo)
Y. Hotta (Univ. of Hyogo) Y. Ishikawa (Nara Inst. of Sci. and Technol.)
N. Ozaki (Wakayama Univ.) M. Seki (Univ. of Tokyo)
K. Takei (Osaka Pref. Univ.) T. Tanaka (Univ. of Tokyo)
2-3: Nanofabrication Section Head K. Takase (Nihon Univ.)
Sub Head S. Shingubara (Kansai Univ.) Ariando (Natl. Univ. of Singapore)
T. Hasegawa (Waseda Univ.) R. Hasunuma (Univ. of Tsukuba)
J.J. Lee (KIMM) Y. Liu (AIST)
T. Okada (Tohoku Univ.) T. Shimizu (Kansai Univ.)
H. Tanaka (Kyushu Inst. of Technol.) K. Tomioka (Hokkaido Univ.)
2-4: Inorganic Nanomaterials Section Head T. Taniguchi (NIMS)
Sub Head T. Tsuchiya (NIMS)
M. Kobayashi (Nagoya Univ.) H. Wagata (Meiji Univ.)
I. Suzuki (Tohoku Univ.) M. Minohara (AIST)
K. Hatakeyama (AIST) J. Kano (Okayama Univ.)
2-5: Organic Nanomaterials Section Head R. Hayakawa (NIMS)
Sub Head A. Masuhara (Yamagata Univ.)
N. Hiroshiba (Natl. Inst. of Technol. Maizuru College) S. Masuo (Kwansei Gakuin Univ.)
S. Nagano (Nagoya Univ.) Y. Tanaka (KIOXIA)
Y. Jeong (Korea Basic Sci. Inst.)
2-6: NanoTool Section Head K. Sugano (Kobe Univ.)
Sub Head T. Hoshino (Hirosaki Univ.) H.J. Lee (KIMM)
    S. Hotta (Hitachi High-Technologies) T. Ishida (Tokyo Inst. of Technol.)
R. Kawamura (Saitama Univ.) N. Kobayashi (Saitama Univ.)
R. Kometani (Univ. of Tokyo) O. Kubo (Osaka Univ.)
H. Miyazako (NTT) T. Namazu (Aichi Inst. of Technol.)
Y. Sugiyama (Hitachi Hi-tech. Sci.)
       
3: Nanoimprint, Hybrid-NIL, Biomimetics, and Functional Surfaces Section Head A. Miyauchi (Tokyo Medical and Dental Univ.)
Sub Head J. Taniguchi (Tokyo Univ. of Sci.) H. Lee (Korea Univ.)
Sub Head F.-Y. Chang (Natl. Taiwan Univ. of Sci. and Technol.) E.-S. Lee (Korea Inst. of Machinery and Materials)
Sub Head H.Y. Low (Singapore Univ. of Technol. and Design)
Y. Hirai (Osaka Pref. Univ.) J. Mizuno (Waseda Univ.)
M. Okada (Asahi Kasei) M. Okinaka (Canon)
N. Sakai (Samsung R&D Inst. Japan) Y. Shimazaki (Hitachi)
K. Suzuki (AIST)
4: BioMEMS, Lab on a Chip, and Nanobiotechnology Section Head A. Miura (Hokkaido Univ.)
Sub Head S. Kumagai (Meijo Univ.)
Vice-Chair K. Furukawa (Meisei Univ.)
T. Akagi (Tokyo Inst. of Technol.) T. Hayashi (Tokyo Inst. of Technol.)
A. Matsumoto (Tokyo Medical and Dental Univ.) T. Miyake (Waseda Univ.)
R. Tero (Toyohashi Univ. of Technol.) M. Tokeshi (Hokkaido Univ.)
5: Microsystem Technology and MEMS Section Head S. Nagasawa (Shibaura Inst. of Technol.)
Sub Head Y. Tomizawa (Toshiba) R. Takigawa (Kyushu Univ.)
Y. Hasegawa (Hiroshima City Univ.) H. Hiraga (Toshiba)
K. Iwami (Tokyo Univ. of Agriculture and Technol. ) S. Miyake (Kobe City College of Technol.)
T. Nakakubo (Canon) T. Namazu (Aichi Inst. of Technol.)
D. Yamane (Tokyo Inst. of Technol.)




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